Deposition of titanium dioxide from TTIP by plasma enhanced and remote plasma enhanced chemical vapor deposition
| Autor: | Nizard, H., Kosinova, M.L., Fainer, N.I., Rumyantsev, Yu. M., Ayupov, B.M., Shubin, Yu. V. |
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| Zdroj: | In Surface & Coatings Technology 2008 202(17):4076-4085 |
| Databáze: | ScienceDirect |
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