Ion beam energy effects on structure and properties of SiO x doped diamond-like carbon films

Autor: Meškinis, Š., Gudaitis, R., Šlapikas, K., Tamulevičius, S., Andrulevičius, M., Guobienė, A., Puišo, J., Niaura, G.
Zdroj: In Surface & Coatings Technology 2008 202(11):2328-2331
Databáze: ScienceDirect