Ion beam energy effects on structure and properties of SiO x doped diamond-like carbon films
Autor: | Meškinis, Š., Gudaitis, R., Šlapikas, K., Tamulevičius, S., Andrulevičius, M., Guobienė, A., Puišo, J., Niaura, G. |
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Zdroj: | In Surface & Coatings Technology 2008 202(11):2328-2331 |
Databáze: | ScienceDirect |
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