Effect of substrate orientation on film properties using AC reactive magnetron sputtering
| Autor: | Pulugurtha, S.R., Bhat, D.G., Gordon, M.H., Shultz, J. |
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| Zdroj: | In Surface & Coatings Technology 2007 202(4):755-761 |
| Databáze: | ScienceDirect |
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