Effect of pressure on nanocrystalline diamond films deposition by hot filament CVD technique from CH 4/H 2 gas mixture
| Autor: | Liang, Xingbo, Wang, Lei, Zhu, Hongliang, Yang, Deren |
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| Zdroj: | In Surface & Coatings Technology 2007 202(2):261-267 |
| Databáze: | ScienceDirect |
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