Batch ALD: Characteristics, comparison with single wafer ALD, and examples
| Autor: | Granneman, Ernst, Fischer, Pamela, Pierreux, Dieter, Terhorst, Herbert, Zagwijn, Peter |
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| Zdroj: | In Surface & Coatings Technology 2007 201(22):8899-8907 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect