Silicon CVD on powders in fluidized bed: Experimental and multifluid Eulerian modelling study
| Autor: | Cadoret, L., Reuge, N., Pannala, S., Syamlal, M., Coufort, C., Caussat, B. |
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| Zdroj: | In Surface & Coatings Technology 2007 201(22):8919-8923 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect