A multiscale model of the plasma assisted deposition of crystalline silicon
| Autor: | Rondanini, M. a, Cereda, S. b, Montalenti, F. b, Miglio, L. b, Cavallotti, C. a, ⁎ |
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| Zdroj: | In Surface & Coatings Technology 2007 201(22):8863-8867 |
| Databáze: | ScienceDirect |
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