Catalytically enhanced H 2-free CVD of transition metals using commercially available precursors
| Autor: | Bahlawane, N. a, ⁎, Antony Premkumar, P. a, Onwuka, K. a, Rott, K. b, Reiss, G. b, Kohse-Höinghaus, K. a |
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| Zdroj: | In Surface & Coatings Technology 2007 201(22):8914-8918 |
| Databáze: | ScienceDirect |
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