Chemical routes to ultra thin films for copper barriers and liners
| Autor: | Shin, Jinhong, Kim, Hyun-Woo, Hwang, Gyeong S., Ekerdt, John G. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2007 201(22):9256-9259 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Shin, Jinhong, Kim, Hyun-Woo, Hwang, Gyeong S., Ekerdt, John G. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2007 201(22):9256-9259 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect