PIC simulation of N 2 and C 2H 2 plasma behavior around plural objects
| Autor: | Miyagawa, Y., Nakadate, H., Tanaka, M., Ikeyama, M., Nakao, S., Miyagawa, S. |
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| Zdroj: | In Surface & Coatings Technology 2007 201(19):8414-8419 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect