Chemical composition and bond structure of carbon-nitride films deposited by CH 4/N 2 dielectric barrier discharge
| Autor: | Majumdar, Abhijit, Schäfer, Jan, Mishra, Puneet, Ghose, Debabrata, Meichsner, Jürgen, Hippler, Rainer |
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| Zdroj: | In Surface & Coatings Technology 2007 201(14):6437-6444 |
| Databáze: | ScienceDirect |
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