High-frequency short-pulsed metal plasma-immersion ion implantation or deposition using filtered DC vacuum-arc plasma
| Autor: | Ryabchikov, A.I., Ryabchikov, I.A., Stepanov, I.B., Usov, Yu.P. |
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| Zdroj: | In Surface & Coatings Technology 2007 201(15):6523-6525 |
| Databáze: | ScienceDirect |
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