RF power and SiO xC yH z deposition efficiency in TEOS/O 2 discharges for the corrosion protection of magnesium alloys

Autor: Voulgaris, Ch., Amanatides, E., Mataras, D., Grassini, S., Angelini, E., Rosalbino, F.
Zdroj: In Surface & Coatings Technology 2006 200(22):6618-6622
Databáze: ScienceDirect