Evaluation of silicon nitride as a diffusion barrier for Gd–Si–Ge films on silicon
| Autor: | Sambandam, Senthil N., Bethala, Bharath, Sood, Dinesh K., Bhansali, Shekhar |
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| Zdroj: | In Surface & Coatings Technology 2005 200(5):1335-1340 |
| Databáze: | ScienceDirect |
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