Deposition of MgO thin film by liquid pulsed injection MOCVD

Autor: Manin, M., Thollon, S., Emieux, F., Berthome, G., Pons, M., Guillon, H.
Zdroj: In Surface & Coatings Technology 2005 200(5):1424-1429
Databáze: ScienceDirect