Deposition of MgO thin film by liquid pulsed injection MOCVD
Autor: | Manin, M., Thollon, S., Emieux, F., Berthome, G., Pons, M., Guillon, H. |
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Zdroj: | In Surface & Coatings Technology 2005 200(5):1424-1429 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Manin, M., Thollon, S., Emieux, F., Berthome, G., Pons, M., Guillon, H. |
---|---|
Zdroj: | In Surface & Coatings Technology 2005 200(5):1424-1429 |
Databáze: | ScienceDirect |
Externí odkaz: |