Characterization of ‘ARE’ deposited silicon nitride films and their feasibility as antireflection coating
| Autor: | Patil, Sheetal J., Mohite, K.C., Mandale, A.B., Takwale, M.G., Gangal, S.A. |
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| Zdroj: | In Surface & Coatings Technology 2005 200(7):2058-2064 |
| Databáze: | ScienceDirect |
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