PZT thin film deposition on Si wafers and optical fibers prepared by reactive DC pulsed magnetron sputtering from a single metallic target
| Autor: | Thapliyal, R., Schwaller, P., Amberg, M., Haug, F.J., Fortunato, G., Hegemann, D., Hug, H.J., Fischer, A. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):1051-1056 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect