Macroscopic plasma-chemical approach to plasma polymerization of HMDSO and CH4
| Autor: | Hegemann, D., Schütz, U., Fischer, A. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):458-462 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hegemann, D., Schütz, U., Fischer, A. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):458-462 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect