Plasma and ion beam characterization by non-conventional methods

Autor: Kersten, H., Wiese, R., Hannemann, M., Kapitov, A., Scholze, F., Neumann, H., Hippler, R.
Zdroj: In Surface & Coatings Technology 1 October 2005 200(1-4):809-813
Databáze: ScienceDirect