Microwave PECVD for large area coating
Autor: | Liehr, M., Dieguez-Campo, M. |
---|---|
Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):21-25 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Liehr, M., Dieguez-Campo, M. |
---|---|
Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):21-25 |
Databáze: | ScienceDirect |
Externí odkaz: |