Plasma study and deposition of DLC/TiC/Ti multilayer structures using technique combining pulsed laser deposition and magnetron sputtering
| Autor: | Bulíř, J., Novotný, M., Jelínek, M., Kocourek, T., Studnička, V. |
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| Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):708-711 |
| Databáze: | ScienceDirect |
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