Etching characteristics of multiple U-type internal linear inductively coupled plasma for flat panel display
| Autor: | Jae Jung, Seung, Nam Kim, Kyong, Young Yeom, Geun |
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| Zdroj: | In Surface & Coatings Technology 1 October 2005 200(1-4):780-783 |
| Databáze: | ScienceDirect |
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