Aging of a fluorinated lubricant on bare and DLC-coated silicon-based MEMS
| Autor: | Eapen, Kalathil C., Patton, Steven T., Smallwood, Steven A., Nainaparampil, Josekutty J., Zabinski, Jeffrey S. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2005 197(2):270-277 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect