Argon plasma modelling in a RF magnetron sputtering system
| Autor: | Palmero, A. *, van Hattum, E.D., Arnoldbik, W.M., Habraken, F.H.P.M. |
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| Zdroj: | In Surface & Coatings Technology 2004 188:392-398 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Palmero, A. *, van Hattum, E.D., Arnoldbik, W.M., Habraken, F.H.P.M. |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2004 188:392-398 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect