The mechanism of low temperature deposition of crystalline anatase by reactive DC magnetron sputtering
Autor: | Barnes, Mark C. *, Kumar, Sunil, Green, Len, Hwang, Nong-Moon, Gerson, Andrea R. |
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Zdroj: | In Surface & Coatings Technology 2005 190(2):321-330 |
Databáze: | ScienceDirect |
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