Investigation of wear surfaces in Si +-implanted uni-directionally aligned silicon nitride using TEM and XPS
| Autor: | Nakamura, Naoki a, *, Hirao, Kiyoshi b, Yamauchi, Yukihiko b |
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| Zdroj: | In Surface & Coatings Technology 2004 186(3):339-345 |
| Databáze: | ScienceDirect |
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