Current–voltage characteristics of a substrate in a crossed E× B field system exposed to plasma flux from vacuum arc plasma sources
Autor: | Levchenko, I. *, Romanov, M., Korobov, M. |
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Zdroj: | In Surface & Coatings Technology 2004 184(2):356-360 |
Databáze: | ScienceDirect |
Externí odkaz: |