Expanding thermal plasma for fast deposition of scratch-resistant SiC xH yO z films
| Autor: | Barrell, Y. a, Creatore, M. a, Schaepkens, M. b, Iacovangelo, C.D. b, Miebach, T. b, van de Sanden, M.C.M. a, * |
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| Zdroj: | In Surface & Coatings Technology 2004 180:367-371 |
| Databáze: | ScienceDirect |
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