Plasma diagnostics in a double inductively coupled source (DICP) for plasma sterilisation
| Autor: | Messerer, P. *, Boenigk, B., Keil, G., Scheubert, P., Awakowicz, P. |
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| Zdroj: | In Surface & Coatings Technology 2003 174:570-573 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect