Mechanical properties of TiN/TiB 2 multilayers deposited by plasma enhanced chemical vapor deposition
| Autor: | Lim, Ju-Wan *, Lee, Jung-Joong, Ahn, H., Rie, K.-T. |
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| Zdroj: | In Surface & Coatings Technology 2003 174:720-724 |
| Databáze: | ScienceDirect |
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