RF amplified magnetron source for efficient titanium nitride deposition
| Autor: | Konstantinidis, S. *, Nouvellon, C., Dauchot, J.-P., Wautelet, M., Hecq, M. |
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| Zdroj: | In Surface & Coatings Technology 2003 174:100-106 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect