Energy-resolved mass spectroscopy of Ar–C 2H 2–N 2 plasma, performed during ion plating of TiC and TiN hard coatings
| Autor: | Maček, Marijan, Mišina, Martin, Čekada, Miha, Panjan, Peter * |
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| Zdroj: | In Surface & Coatings Technology 2003 174:943-946 |
| Databáze: | ScienceDirect |
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