Investigation of the throw distance of sputtered atoms under consideration of gas rarefaction
| Autor: | Drüsedau, Tilo P. * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2003 174:470-474 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Drüsedau, Tilo P. * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2003 174:470-474 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect