Deposition of carbon nitride films by an electron-beam-excited plasma sputtering method
| Autor: | Ban, Masahito *, Hasegawa, Takeshi, Goto, Akiko, Dake, Yoshinori, Kakudate, Yozo |
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| Zdroj: | In Surface & Coatings Technology 2003 169:332-335 |
| Databáze: | ScienceDirect |
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