Characteristic of a dielectric barrier discharges using capillary dielectric and its application to photoresist etching
| Autor: | Yi, Chang-heon, Lee, Yong-hyuk, Woo Kim, Dong, Yeom, Geun-young * |
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| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:723-727 |
| Databáze: | ScienceDirect |
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