Role of H2 in the deposition of CNx layers by PE-HF-CVD
| Autor: | Dumitriu, D, Schmid, P.E, Karimi, A * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:189-195 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Dumitriu, D, Schmid, P.E, Karimi, A * |
|---|---|
| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:189-195 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect