The properties of aluminum oxide and nitride films prepared by d.c. sputter-deposition from metallic targets
| Autor: | Drüsedau, Tilo P. *, Neubert, Thomas, Panckow, Andreas N. |
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| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:164-168 |
| Databáze: | ScienceDirect |
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