High power pulsed magnetron sputtered CrNx films
| Autor: | Ehiasarian, A.P *, Münz, W.-D, Hultman, L, Helmersson, U, Petrov, I |
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| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:267-272 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Ehiasarian, A.P *, Münz, W.-D, Hultman, L, Helmersson, U, Petrov, I |
|---|---|
| Zdroj: | In Surface & Coatings Technology 30 January 2003 163-164:267-272 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect