Influence of nitrogen–argon gas mixtures on reactive magnetron sputtering of hard Si–C–N films
| Autor: | Vlček, Jaroslav a, *, Kormunda, Martin a, Čı́zek, Jiřı́ a, Peřina, Vratislav b, Zemek, Josef c |
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| Zdroj: | In Surface & Coatings Technology 2002 160(1):74-81 |
| Databáze: | ScienceDirect |
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