The effects of structure, composition, and chemical bonding on the mechanical properties of Si-aC:H thin films
| Autor: | Evans, Ryan D, Doll, Gary L, Morrison Jr, Philip W, Bentley, James, More, Karren L, Glass, Jeffrey T * |
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| Zdroj: | In Surface & Coatings Technology 2002 157(2):197-206 |
| Databáze: | ScienceDirect |
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