Plasma doping for the fabrication of ultra-shallow junctions
| Autor: | Felch, S.B *, Fang, Z, Koo, B.-W, Liebert, R.B, Walther, S.R, Hacker, D |
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| Zdroj: | In Surface & Coatings Technology 2002 156(1):229-236 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Felch, S.B *, Fang, Z, Koo, B.-W, Liebert, R.B, Walther, S.R, Hacker, D |
|---|---|
| Zdroj: | In Surface & Coatings Technology 2002 156(1):229-236 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect