Surface and bulk characterizations of CN x thin films made by r.f. magnetron sputtering
| Autor: | Tétard, F. *, Djemia, P., Angleraud, B., Mubumbila, N., Tessier, P.Y. |
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| Zdroj: | In Surface & Coatings Technology 2002 151:184-188 |
| Databáze: | ScienceDirect |
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