Effect of O 2(CO 2)/C 4F 8O gas combinations on global warming gas emission in silicon nitride PECVD plasma cleaning

Autor: Oh, B.H. *, Bae, J.W., Kim, J.H., Kim, K.J., Ahn, Y.S., Lee, N.-E., Yeom, G.Y., Yoon, S.S., Chae, S.-K., Ku, M.-S., Lee, S.-G., Cho, D.-H.
Zdroj: In Surface & Coatings Technology 2001 146:522-527
Databáze: ScienceDirect
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