Characteristics of He/O 2 atmospheric pressure glow discharge and its dry etching properties of organic materials
| Autor: | Lee, Yong-Hyuk *, Yi, Chang-Heon, Chung, Min-Jae, Yeom, Geun-Young |
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| Zdroj: | In Surface & Coatings Technology 2001 146:474-479 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect