Energy resolved ion mass spectroscopy of the plasma during reactive magnetron sputtering
| Autor: | Mišina, Martin *, Shaginyan, Leonid R., Maček, Marijan, Panjan, Peter |
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| Zdroj: | In Surface & Coatings Technology 2001 142:348-354 |
| Databáze: | ScienceDirect |
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