Preparation of aluminum oxide films by ion beam assisted deposition
| Autor: | Shimizu, I, Setsuhara, Y *, Miyake, S, Kumagai, M, Ogata, K, Kohata, M, Yamaguchi, K |
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| Zdroj: | In Surface & Coatings Technology 2000 131(1):187-191 |
| Databáze: | ScienceDirect |
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