A study on the high rate deposition of CrN x films with controlled microstructure by magnetron sputtering
| Autor: | Nam, Kyung H. *, Jung, Min J., Han, Jeon G. |
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| Zdroj: | In Surface & Coatings Technology 2000 131(1):222-227 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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