Synthesis of aluminum nitride films by activated reactive ion plating with a cathodic arc source
| Autor: | Xin, Hai-Wei *, Tian, Lin-Hai, Pan, Jun-De, He, Qi, Xu, Zhong, Zhang, Zhi-Ming |
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| Zdroj: | In Surface & Coatings Technology 2000 131(1):167-170 |
| Databáze: | ScienceDirect |
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