New method of measuring the permittivity of silicon wafer, with relevance to permittivity-based quality sensing

Autor:	Chung, D.D.L., Duong, Dang Q.
Zdroj:	In Materials Chemistry and Physics 15 April 2023 299
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect