Multimolecular interactions for SiCxNyOz film formation by parallel plate plasma-enhanced chemical vapor deposition without heat assistance
| Autor: | Kawakami, Hiroki, Hori, Kenta, Watanabe, Toru, Habuka, Hitoshi |
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| Zdroj: | In Materials Chemistry and Physics 1 February 2023 295 |
| Databáze: | ScienceDirect |
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